Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

PDF) Oxidation processes in hydrogenated amorphous silicon nitride films deposited by ArF laser-induced CVD at low temperatures

PDF) Oxidation processes in hydrogenated amorphous silicon nitride films deposited by ArF laser-induced CVD at low temperatures

Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasma - ScienceDirect

PDF) Oxidation processes in hydrogenated amorphous silicon nitride films deposited by ArF laser-induced CVD at low temperatures

PDF] Diffusion of Water Molecules in Amorphous Silica

(PDF) Stability of SiNx Prepared by Plasma-Enhanced Chemical Vapor Deposition at Low Temperature

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

PDF) Stability of SiNx Prepared by Plasma-Enhanced Chemical Vapor Deposition at Low Temperature