High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

Optimization of deep reactive ion etching for microscale silicon

PDF] An advanced reactive ion etching process for very high aspect

High aspect ratio silicon ring-shape micropillars fabricated by

Fabrication of high-aspect ratio silicon nanopillars for

Deep reactive ion etching of 'grass-free' widely-spaced periodic

Micromachines, Free Full-Text

Micromachines, Free Full-Text

Micromachines, Free Full-Text

Micromachines, Free Full-Text

PDF) Towards the Fabrication of High-Aspect-Ratio Silicon Gratings

Micro‐/Nanopillars for Micro‐ and Nanotechnologies Using

High aspect ratio silicon ring-shape micropillars fabricated by

High aspect ratio silicon ring-shape micropillars fabricated by